Open AccessRADIO-FREQUENCY MULTI-MODE MICROMECHANICAL DISK RESONATORS IN 500NM THIN SILICON CARBIDE (SIC)
Author(s) -
Hossein Zamani,
J. Lee,
Srihari Rajgopal,
Christian A. Zorman,
Mehran Mehregany,
Philip X.L. Feng
Publication year - 2012
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.96
Subject(s) - silicon carbide , materials science , resonator , optoelectronics , radio frequency , silicon , wide bandgap semiconductor , mode (computer interface) , computer science , composite material , telecommunications , operating system