Open AccessRADIO-FREQUENCY MULTI-MODE MICROMECHANICAL DISK RESONATORS IN 500NM THIN SILICON CARBIDE (SIC)
Author(s) -
Hossein Zamani,
J. Lee,
Srihari Rajgopal,
Christian A. Zorman,
Mehran Mehregany,
Philip X.L. Feng
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.96
Subject(s) - resonator , flexural strength , materials science , radio frequency , silicon carbide , microwave , optoelectronics , optics , acoustics , composite material , physics , electrical engineering , engineering , quantum mechanics
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