Open AccessMICROMACHINED POLYCRYSTALLINE DIAMOND HEMISPHERICAL SHELL RESONATORS
Author(s) -
Mei-Lin Chan,
Junfeng Xie,
Peter Fonda,
Hadi Najar,
Kenji Yamazaki,
Liwei Lin,
David A. Horsley
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.94
Subject(s) - materials science , resonator , surface micromachining , thermoelastic damping , diamond , shell (structure) , microelectromechanical systems , silicon , optoelectronics , cantilever , machining , piezoelectricity , vibration , millimeter , composite material , optics , fabrication , acoustics , metallurgy , medicine , alternative medicine , pathology , physics , thermal , meteorology
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