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MEMS AND METAMATERIAL-BASED TERAHERTZ DETECTOR
Author(s) -
Hu Tao,
Emil Kadlec,
Andrew C. Strikwerda,
Kebin Fan,
Willie J. Padilla,
Richard D. Averitt,
Eric A. Shaner,
X. Zhang
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.85
Subject(s) - responsivity , terahertz radiation , microelectromechanical systems , detector , metamaterial , materials science , optoelectronics , cantilever , optics , resonator , noise equivalent power , split ring resonator , pixel , deflection (physics) , physics , composite material

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