
HIGHLY SENSITIVE III-V NITRIDE BASED PIEZORESISTIVE MICROCANTILEVER USING EMBEDDED ALGAN/GAN HFET
Author(s) -
Abdul Talukdar,
Goutam Koley
Publication year - 2012
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.83
Subject(s) - materials science , optoelectronics , piezoresistive effect , nitride , gallium nitride , wide bandgap semiconductor , nanotechnology , layer (electronics)