FORCED OSCILLATION AND HIGHER HARMONIC DETECTION IN AN INTEGRATED CMOS-MEMS SCANNING PROBE MICROSCOPE | Zendy

Niladri Sarkar | Zendy; Raafat R. Mansour | Zendy; Kyle Trainor | Zendy

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FORCED OSCILLATION AND HIGHER HARMONIC DETECTION IN AN INTEGRATED CMOS-MEMS SCANNING PROBE MICROSCOPE

Author(s) -

Niladri Sarkar,

Raafat R. Mansour,

Kyle Trainor

Publication year - 2012

Publication title -

1998 solid-state, actuators, and microsystems workshop technical digest

Language(s) - English

Resource type - Conference proceedings

DOI - 10.31438/trf.hh2012.82

Subject(s) - scanning thermal microscopy , microelectromechanical systems , non contact atomic force microscopy , materials science , scanning probe microscopy , oscillation (cell signaling) , cmos , atomic force microscopy , thermal , chip , microscope , microscopy , atomic force acoustic microscopy , conductive atomic force microscopy , optoelectronics , optics , nanotechnology , magnetic force microscope , physics , electrical engineering , engineering , chemistry , biochemistry , magnetization , quantum mechanics , meteorology , magnetic field

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