Open AccessFORCED OSCILLATION AND HIGHER HARMONIC DETECTION IN AN INTEGRATED CMOS-MEMS SCANNING PROBE MICROSCOPE
Author(s) -
Niladri Sarkar,
Raafat R. Mansour,
Kyle Trainor
Publication year - 2012
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.82
Subject(s) - microelectromechanical systems , oscillation (cell signaling) , cmos , forced oscillation , harmonic , materials science , optoelectronics , physics , acoustics , electrical engineering , engineering , chemistry , biochemistry , electrical impedance