Open AccessA SINGLE-CHIP CMOS-MEMS MICROGRAVITY ACCELEROMETER
Author(s) -
Y. Zhang,
George Meng,
N. Yazdi
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.76
Subject(s) - accelerometer , capacitive sensing , microelectromechanical systems , cmos , materials science , wafer , acceleration , sensitivity (control systems) , chip , noise floor , capacitance , electrical engineering , fabrication , noise (video) , optoelectronics , electronic engineering , acoustics , engineering , noise measurement , computer science , electrode , physics , noise reduction , operating system , alternative medicine , artificial intelligence , image (mathematics) , pathology , classical mechanics , quantum mechanics , medicine
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom