Open AccessA SINGLE-CHIP CMOS-MEMS MICROGRAVITY ACCELEROMETER
Author(s) -
Y. Zhang,
George Meng,
N. Yazdi
Publication year - 2012
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.76
Subject(s) - accelerometer , cmos , microelectromechanical systems , chip , system on a chip , lab on a chip , computer science , electronic engineering , electrical engineering , embedded system , engineering , materials science , optoelectronics , microfluidics , nanotechnology , operating system