Open AccessCHARACTERIZATION AND PRODUCTION CONTROL FOR DRIE OF MEMS ACCELEROMETERS USING OPTICAL DISPLACEMENT TRANSDUCER MEASUREMENTS
Author(s) -
B. Keese,
Brian D. Homeijer,
Jr. L. Williams,
P. Knutrud
Publication year - 2012
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.71
Subject(s) - accelerometer , transducer , microelectromechanical systems , displacement (psychology) , characterization (materials science) , deep reactive ion etching , materials science , interferometry , acoustics , computer science , optoelectronics , optics , etching (microfabrication) , physics , nanotechnology , reactive ion etching , layer (electronics) , psychology , psychotherapist , operating system