Open AccessTHREE-DIMENSIONAL HIERARCHICAL MICROBATTERY ELECTRODES FOR TUNABLE HIGH ENERGY AND POWER DENSITY BATTERIES
Author(s) -
Konstantinos Gerasopoulos,
Ekaterina Pomerantseva,
Allan Brown,
Chien-ming Wang,
James N. Culver,
Matthew McCarthy,
Reza Ghodssi
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.28
Subject(s) - materials science , nanostructure , electrode , fabrication , microfabrication , atomic layer deposition , power density , nanotechnology , battery (electricity) , optoelectronics , deposition (geology) , layer (electronics) , power (physics) , chemistry , physics , quantum mechanics , medicine , paleontology , alternative medicine , pathology , sediment , biology
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