Open AccessNANOGAP ULTRASONIC ACTUATOR FOR NON-CONTACT CONTROL OF LEVITATED INERTIAL SENSOR ROTOR
Author(s) -
Sarvani Piratla,
Amit Lal,
Manoj Kumar Pandey
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.21
Subject(s) - actuator , rotor (electric) , ultrasonic motor , spinning , accelerometer , voltage , rotation (mathematics) , calibration , inertial frame of reference , gyroscope , control theory (sociology) , materials science , acoustics , engineering , mechanical engineering , physics , computer science , electrical engineering , vibration , aerospace engineering , control (management) , quantum mechanics , artificial intelligence
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