Open AccessA SELF-CONTROLLED FREQUENCY TRIMMING TECHNIQUE FOR MICROMECHANICAL RESONATORS
Author(s) -
Arash Hajjam,
Kristine Dietrich,
Amir Rahafrooz,
Siavash Pourkamali
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.19
Subject(s) - trimming , resonator , resonance (particle physics) , materials science , silicon , optoelectronics , acoustics , thermal , work (physics) , electronic engineering , physics , engineering , mechanical engineering , particle physics , meteorology
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