Open AccessAPPLICATION OF A PREDICTION METHODOLOGY FOR MEMS RELIABILITY IN SHOCK ENVIRONMENTS
Author(s) -
Michael Naumann,
D. Lin,
A. McNeil,
G. Li,
Jan Mehner
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.129
Subject(s) - stiction , microelectromechanical systems , reliability (semiconductor) , reliability engineering , shock (circulatory) , breakage , computer science , electric shock , engineering , mechanical engineering , materials science , medicine , power (physics) , physics , optoelectronics , quantum mechanics , world wide web
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