Open AccessLOW POWER STRAIN SENSING USING TUNNELING CURRENT THROUGH MOS CAPACITORS
Author(s) -
Lifeng Zhu,
Shamus McNamara
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.121
Subject(s) - piezoresistive effect , capacitor , quantum tunnelling , capacitive sensing , cmos , electrical engineering , materials science , power (physics) , low power electronics , accelerometer , optoelectronics , fabrication , microelectromechanical systems , electronic engineering , power consumption , computer science , engineering , physics , voltage , medicine , quantum mechanics , alternative medicine , pathology , operating system
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