Open AccessHIGH-STRESS FATIGUE EXPERIMENTS ON SINGLE CRYSTAL SILICON IN AN OXYGEN-FREE ENVIRONMENT
Author(s) -
Vu A. Hong,
S. Yoneoka,
M. Messana,
A.B. Graham,
J. Salvia,
Todd T. Branchflower,
Eldwin J. Ng,
Thomas W. Kenny
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.120
Subject(s) - materials science , silicon , seal (emblem) , stress (linguistics) , oxygen , composite material , inert gas , optoelectronics , chemistry , linguistics , philosophy , organic chemistry , art , visual arts
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