Open AccessDIRECT-WRITE NANOLITHOGRAPHY ON FLEXIBLE SUBSTRATE
Author(s) -
Juyoung Chang,
Michael Dommer,
B.Y. Lee,
L.Y. Lin
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.117
Subject(s) - nanolithography , materials science , microelectronics , micrometer , lithography , nanotechnology , photolithography , dry etching , etching (microfabrication) , substrate (aquarium) , polymer substrate , electrospinning , graphene , optoelectronics , polymer , fabrication , composite material , mechanical engineering , engineering , medicine , oceanography , alternative medicine , pathology , geology , layer (electronics)
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