
DIRECT-WRITE NANOLITHOGRAPHY ON FLEXIBLE SUBSTRATE
Author(s) -
Jina Chang,
Michael Dommer,
B.Y. Lee,
Lijia Lin
Publication year - 2012
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.117
Subject(s) - nanolithography , substrate (aquarium) , computer science , materials science , optoelectronics , nanotechnology , fabrication , geology , medicine , oceanography , alternative medicine , pathology