Open AccessCVD HAFNIUM DIBORIDE AS A CONTACT MATERIAL FOR NANOELECTROMECHANICAL SWITCHES
Author(s) -
W. S. Lee,
Andrew N. Cloud,
J. Provine,
Noureddine Tayebi,
Roozbeh Parsa,
Subhasish Mitra,
H.S. Philip Wong,
John R. Abelson,
Roger T. Howe
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.116
Subject(s) - hafnium , materials science , chemical vapor deposition , contact resistance , melting point , sheet resistance , optoelectronics , conductivity , nitrogen , composite material , metallurgy , layer (electronics) , chemistry , zirconium , organic chemistry
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