Open AccessTRAVELING WAVE ULTRASONIC MOTOR USING THIN-FILM PIEZOELECTRICS
Author(s) -
Ryan Q. Rudy,
Gabriel L. Smith,
Don L. DeVoe,
R. G. Polcawich
Publication year - 2012
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.111
Subject(s) - ultrasonic motor , acoustics , ultrasonic sensor , traveling wave , piezoelectricity , materials science , electrical engineering , engineering , physics , mathematical analysis , mathematics