Open AccessTRAVELING WAVE ULTRASONIC MOTOR USING THIN-FILM PIEZOELECTRICS
Author(s) -
Ryan Q. Rudy,
Gabriel L. Smith,
Don L. DeVoe,
R. G. Polcawich
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.111
Subject(s) - ultrasonic motor , lead zirconate titanate , fabrication , piezoelectric motor , ultrasonic sensor , rotor (electric) , materials science , piezoelectricity , acoustics , rotation (mathematics) , microelectromechanical systems , torque , french horn , electric motor , gyroscope , electrical engineering , mechanical engineering , engineering , optoelectronics , computer science , aerospace engineering , physics , ferroelectricity , dielectric , artificial intelligence , medicine , alternative medicine , pathology , thermodynamics
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