Open AccessLOW-COST THERMAL MEMS GYROSCOPE
Author(s) -
Albert M. Leung
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.97
Subject(s) - gyroscope , vibrating structure gyroscope , microelectromechanical systems , thermal , computer science , aerospace engineering , materials science , engineering , physics , optoelectronics , meteorology