Open AccessLOW-COST THERMAL MEMS GYROSCOPE
Author(s) -
Albert M. Leung
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.97
Subject(s) - gyroscope , microelectromechanical systems , vibrating structure gyroscope , noise (video) , thermal , fabrication , process (computing) , electrical engineering , computer science , engineering , electronic engineering , aerospace engineering , physics , optoelectronics , meteorology , medicine , alternative medicine , pathology , artificial intelligence , image (mathematics) , operating system
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