Open AccessAN ALUMINUM NITRIDE PIEZOELECTRIC MICROPHONE FOR AEROACOUSTIC APPLICATIONS
Author(s) -
M. D. Williams,
Benjamin A. Griffin,
Achim Ecker,
Jessica Meloy,
Mark Sheplak
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.96
Subject(s) - acoustics , piezoelectricity , microphone , aluminium , materials science , nitride , computer science , composite material , physics , loudspeaker , layer (electronics)