Open AccessAN ALUMINUM NITRIDE PIEZOELECTRIC MICROPHONE FOR AEROACOUSTIC APPLICATIONS
Author(s) -
Matthew D. Williams,
Ben Griffin,
Achim Ecker,
Jessica Meloy,
Mark Sheplak
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.96
Subject(s) - acoustics , microphone , fuselage , piezoelectricity , materials science , noise (video) , sensitivity (control systems) , noise canceling microphone , frequency response , engineering , electronic engineering , electrical engineering , computer science , aerospace engineering , microphone array , physics , loudspeaker , artificial intelligence , image (mathematics)
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