Open AccessTIME EVOLUTION OF RELEASED HOLE ARRAYS INTO MEMBRANES VIA VACUUM SILICON MIGRATION
Author(s) -
J. Provine,
Andrew B. Graham,
M.W. Messana,
Nicola Ferralis,
Rishi Kant,
Roya Maboudian,
Thomas W. Kenny,
Roger T. Howe
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.92
Subject(s) - silicon , membrane , materials science , optoelectronics , nanotechnology , chemistry , biochemistry