Open AccessTIME EVOLUTION OF RELEASED HOLE ARRAYS INTO MEMBRANES VIA VACUUM SILICON MIGRATION
Author(s) -
J. Provine,
A.B. Graham,
M. Messana,
Nicola Ferralis,
Rishi Kant,
Roya Maboudian,
Thomas W. Kenny,
Roger T. Howe
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.92
Subject(s) - silicon , membrane , materials science , evaporation , scanning electron microscope , vacuum evaporation , chemical physics , optoelectronics , nanotechnology , chemistry , composite material , thin film , physics , thermodynamics , biochemistry
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