Open AccessPDMS AND SILICON MICROMECHANISMS IN A MONOLITHIC PROCESS
Author(s) -
Aaron P. Gerratt,
Ivan Penskiy,
Sarah Bergbreiter
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.91
Subject(s) - silicon , materials science , process (computing) , optoelectronics , engineering physics , computer science , engineering , operating system