Open AccessPDMS AND SILICON MICROMECHANISMS IN A MONOLITHIC PROCESS
Author(s) -
Aaron P. Gerratt,
Ivan Penskiy,
Sarah Bergbreiter
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.91
Subject(s) - silicon , materials science , fabrication , wafer , deep reactive ion etching , microelectromechanical systems , etching (microfabrication) , elastomer , optoelectronics , reactive ion etching , process (computing) , hybrid silicon laser , nanotechnology , composite material , computer science , operating system , medicine , alternative medicine , pathology , layer (electronics)
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