Open AccessMICROFABRICATED QUASIPERIODIC OPTICAL DIFFRACTION APERTURE ARRAYS FOR THE NANOMETROLOGY OPTICAL RULER IMAGING SYSTEM
Author(s) -
Norimasa Yoshimizu,
Amit Lal,
Clifford R. Pollock
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.89
Subject(s) - nanometrology , optics , quasiperiodic function , diffraction , ruler , aperture (computer memory) , metrology , materials science , physics , quantum mechanics , acoustics , condensed matter physics
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