Open AccessMICROFABRICATED QUASIPERIODIC OPTICAL DIFFRACTION APERTURE ARRAYS FOR THE NANOMETROLOGY OPTICAL RULER IMAGING SYSTEM
Author(s) -
Norimasa Yoshimizu,
Amit Lal,
Clifford R. Pollock
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.89
Subject(s) - nanometrology , quasiperiodic function , optics , aperture (computer memory) , diffraction , ptychography , optical imaging , ruler , materials science , physics , metrology , quantum mechanics , acoustics , condensed matter physics