Open AccessCHARACTERIZATION OF THE COMPLETE STRESS STATE IN THIN FILM CMOS LAYERED MATERIALS
Author(s) -
Fabio Fachin,
M. Varghese,
S.A. Nikles,
Brian L. Wardle
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.84
Subject(s) - cmos , characterization (materials science) , stress (linguistics) , materials science , boundary value problem , nonlinear system , measure (data warehouse) , compressive strength , boundary (topology) , structural engineering , composite material , electronic engineering , computer science , optoelectronics , engineering , mathematics , mathematical analysis , nanotechnology , physics , linguistics , philosophy , quantum mechanics , database
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