Open AccessSILICON MICROMACHINING TECHNIQUES FOR SUBMILLIMETER WAVE APPLICATIONS
Author(s) -
C. Lee,
B. Thomas,
Goutam Chattopadhyay,
Alex Peralta,
Renjie Lin,
Chan Sik Jung,
IImran Mehdi
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.71
Subject(s) - surface micromachining , submillimeter wave , silicon , optoelectronics , materials science , bulk micromachining , computer science , fabrication , physics , optics , millimeter , medicine , alternative medicine , pathology