Open AccessSILICON MICROMACHINING TECHNIQUES FOR SUBMILLIMETER WAVE APPLICATIONS
Author(s) -
C. Lee,
B. Thomas,
Goutam Chattopadhyay,
A. Peralta,
Renjie Lin,
Changhyun Jung,
I. Mehdi
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.71
Subject(s) - surface micromachining , terahertz radiation , silicon , materials science , optoelectronics , amplifier , waveguide , silicon chip , extremely high frequency , chip , machining , w band , radiometer , millimeter , optics , fabrication , cmos , electrical engineering , physics , engineering , medicine , alternative medicine , pathology , metallurgy
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