Open AccessPIEZORESISTIVE MICROCANTILEVERS FROM ULTRANANOCRYSTALLINE DIAMOND
Author(s) -
Natalya L. Privorotskaya,
Hongjun Zeng,
John A. Carlisle,
Rashid Bashir,
William P. King
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.66
Subject(s) - diamond , piezoresistive effect , materials science , nanotechnology , optoelectronics , composite material