Open AccessPIEZORESISTIVE MICROCANTILEVERS FROM ULTRANANOCRYSTALLINE DIAMOND
Author(s) -
Natalya L. Privorotskaya,
Hongjun Zeng,
John A. Carlisle,
Rashid Bashir,
William P. King
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.66
Subject(s) - piezoresistive effect , materials science , diamond , gauge factor , atmospheric temperature range , optoelectronics , cantilever , electrical resistivity and conductivity , doping , temperature coefficient , nanotechnology , fabrication , composite material , electrical engineering , medicine , alternative medicine , physics , pathology , meteorology , engineering
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