Open AccessINTEGRATED VERTICAL PARALLEL PLATE CAPACITIVE HUMIDITY SENSOR
Author(s) -
Nathan Lazarus,
G.K. Fedder
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.64
Subject(s) - capacitive sensing , humidity , materials science , electrical engineering , computer science , acoustics , engineering , meteorology , physics