Open AccessINTEGRATED VERTICAL PARALLEL PLATE CAPACITIVE HUMIDITY SENSOR
Author(s) -
Nathan Lazarus,
Gary K. Fedder
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.64
Subject(s) - capacitive sensing , materials science , polyimide , humidity , cmos , optoelectronics , capacitance , stack (abstract data type) , dielectric , electrode , etching (microfabrication) , electrical engineering , layer (electronics) , electronic engineering , nanotechnology , engineering , computer science , physics , quantum mechanics , thermodynamics , programming language
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