Open AccessFABRICATION AND ELECTRICAL CHARACTERIZATION OF MICROSCALE DIELECTRIC BARRIER DISCHARGE DEVICES
Author(s) -
Justin Zito,
David P. Arnold
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.63
Subject(s) - microscale chemistry , materials science , microfabrication , fabrication , dielectric barrier discharge , dielectric , plasma , optoelectronics , electrical impedance , voltage , characterization (materials science) , electrode , electrical engineering , nanotechnology , chemistry , medicine , alternative medicine , mathematics , mathematics education , pathology , physics , quantum mechanics , engineering
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