Open AccessFABRICATION AND ELECTRICAL CHARACTERIZATION OF MICROSCALE DIELECTRIC BARRIER DISCHARGE DEVICES
Author(s) -
Justin C. Zito,
David P. Arnold
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.63
Subject(s) - microscale chemistry , fabrication , characterization (materials science) , materials science , dielectric , optoelectronics , nanotechnology , medicine , alternative medicine , mathematics , mathematics education , pathology