Open AccessACOUSTIC TRANSDUCERS BUILT ON EDGE-RELEASED MEMS STRUCTURES
Author(s) -
SaoJie Chen,
Yong Kyung Choe,
E.S. Kim
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.62
Subject(s) - diaphragm (acoustics) , materials science , cantilever , microelectromechanical systems , transducer , acoustics , fabrication , piezoelectricity , pressure sensor , enhanced data rates for gsm evolution , resist , bandwidth (computing) , composite material , optoelectronics , engineering , vibration , mechanical engineering , telecommunications , physics , medicine , alternative medicine , pathology , layer (electronics)
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