Open AccessACOUSTIC TRANSDUCERS BUILT ON EDGE-RELEASED MEMS STRUCTURES
Author(s) -
Shih Jui Chen,
Youngki Choe,
Eun Sok Kim
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.62
Subject(s) - transducer , microelectromechanical systems , enhanced data rates for gsm evolution , acoustics , materials science , computer science , optoelectronics , telecommunications , physics