Open AccessONE MASK ONE EXPOSURE IN-SITU MAGNETIC ACTUATOR FABRICATION METHOD
Author(s) -
Siu-Wah Chung,
J. Kim,
Sung−Wook Min,
Sunghoon Kwon,
L.N. Kim
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.58
Subject(s) - fabrication , actuator , in situ , materials science , computer science , physics , artificial intelligence , medicine , alternative medicine , pathology , meteorology