Open AccessONE MASK ONE EXPOSURE IN-SITU MAGNETIC ACTUATOR FABRICATION METHOD
Author(s) -
S. E. Chung,
J. Kim,
SoYoun Min,
Sunghoon Kwon,
L.N. Kim
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.58
Subject(s) - fabrication , actuator , materials science , magnet , magnetic nanoparticles , nanotechnology , microfluidics , layer (electronics) , optoelectronics , nanoparticle , electrical engineering , engineering , medicine , alternative medicine , pathology
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