Open AccessFABRICATION OF MULTIPLE HEIGHT MICROPROBES USING UV LITHOGRAHY ON TIMED-DEVELOPMENT-AND-THERMAL-REFLOWED PHOTORESIST
Author(s) -
Jungkwun Kim,
Hyunah Ahn,
Xing Cheng,
K.-T. Kim,
G.-H. Kim,
Yong-Kyu Yoon
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.54
Subject(s) - photoresist , fabrication , thermal , materials science , development (topology) , optics , optoelectronics , nanotechnology , physics , mathematics , medicine , alternative medicine , pathology , layer (electronics) , meteorology , mathematical analysis