Open AccessFABRICATION OF MULTIPLE HEIGHT MICROPROBES USING UV LITHOGRAHY ON TIMED-DEVELOPMENT-AND-THERMAL-REFLOWED PHOTORESIST
Author(s) -
Jungkwun Kim,
Hyunah Ahn,
Xing Cheng,
K.-T. Kim,
G.-H. Kim,
YongKyu Yoon
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.54
Subject(s) - photoresist , microprobe , materials science , fabrication , lithography , thermal , optics , polymer , development (topology) , contact angle , surface micromachining , composite material , optoelectronics , layer (electronics) , mineralogy , chemistry , medicine , mathematical analysis , alternative medicine , physics , mathematics , pathology , meteorology
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