Open AccessCONTACT GEOMETRY EFFECTS ON FRICTION IN MEMS PROBE ARRAYS
Author(s) -
Winfield Smith,
P.G. Hartwell,
R.G. Walmsley,
Tom Kenny
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.53
Subject(s) - slider , materials science , friction coefficient , microelectromechanical systems , contact geometry , steady state (chemistry) , mechanics , contact area , coefficient of friction , normal force , contact force , composite material , geometry , mechanical engineering , nanotechnology , classical mechanics , engineering , physics , chemistry , mathematics
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