Open AccessCONTACT GEOMETRY EFFECTS ON FRICTION IN MEMS PROBE ARRAYS
Author(s) -
Winfield Smith,
P.G. Hartwell,
R.G. Walmsley,
Tom Kenny
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.53
Subject(s) - microelectromechanical systems , materials science , geometry , mechanical engineering , acoustics , engineering , optoelectronics , physics , mathematics