Open AccessLUMPED-ELEMENT ANALYSIS OF AN ELECTROSTATIC SQUEEZE-FILM MEMS DROPLET EJECTOR
Author(s) -
Edward P. Furlani,
Hrishikesh V. Panchawagh,
Thomas L. Sounart
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.46
Subject(s) - injector , microelectromechanical systems , materials science , finite element method , element (criminal law) , mechanical engineering , engineering , optoelectronics , structural engineering , political science , law