Open AccessLUMPED-ELEMENT ANALYSIS OF AN ELECTROSTATIC SQUEEZE-FILM MEMS DROPLET EJECTOR
Author(s) -
Edward P. Furlani,
Hrishikesh V. Panchawagh,
Thomas L. Sounart
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.46
Subject(s) - body orifice , injector , piston (optics) , microelectromechanical systems , fluidics , mechanics , materials science , displacement (psychology) , microfluidics , jet (fluid) , drop (telecommunication) , mechanical engineering , acoustics , physics , engineering , electrical engineering , optics , optoelectronics , nanotechnology , psychology , wavefront , psychotherapist
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