Open AccessPOROUS SILICON RESONATOR FOR SENSITIVE VAPOR DETECTION
Author(s) -
Yong Ha Hwang,
Fang Gao,
Rob N. Candler
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.41
Subject(s) - resonator , microscale chemistry , porous silicon , materials science , silicon , porosity , optoelectronics , isopropyl alcohol , sensitivity (control systems) , nanoscopic scale , porous medium , nanotechnology , electronic engineering , chemical engineering , composite material , mathematics education , mathematics , engineering
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