Open AccessPOROUS SILICON RESONATOR FOR SENSITIVE VAPOR DETECTION
Author(s) -
Yong Il Hwang,
Fang Gao,
Robert Candler
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.41
Subject(s) - resonator , silicon , materials science , optoelectronics , porous silicon , nanotechnology