Open AccessCOMPOSITE POLYSILICON-PLATINUM LATERAL NANOELECTROMECHANICAL RELAYS
Author(s) -
Roozbeh Parsa,
Soogine Chong,
Nagesh D. Patil,
K. Akarvardar,
J. Provine,
D. Lee,
David Elata,
Subhasish Mitra,
H.-S. Philip Wong,
Roger T. Howe
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.2
Subject(s) - composite number , materials science , platinum , nanoelectromechanical systems , optoelectronics , nanotechnology , composite material , nanoparticle , chemistry , nanomedicine , biochemistry , catalysis