Open AccessCOMPOSITE POLYSILICON-PLATINUM LATERAL NANOELECTROMECHANICAL RELAYS
Author(s) -
Roozbeh Parsa,
S. Chong,
Nagesh D. Patil,
Kerem Akarvardar,
J. Provine,
D. Lee,
David Elata,
Subhasish Mitra,
H.S. Philip Wong,
Roger T. Howe
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.2
Subject(s) - materials science , fabrication , platinum , composite number , electrode , decoupling (probability) , optoelectronics , contact resistance , lithography , electrical contacts , coating , relay , nanotechnology , composite material , layer (electronics) , engineering , biochemistry , chemistry , catalysis , medicine , alternative medicine , power (physics) , physics , pathology , control engineering , quantum mechanics
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