Open AccessSTABLE OSCILLATION OF MEMS RESONATORS BEYOND THE CRITICAL BIFURCATION POINT
Author(s) -
H.K. Lee,
J. Salvia,
S. Yoneoka,
Gaurav Bahl,
Yu Qiao Qu,
R. Melamud,
Saurabh A. Chandorkar,
Matthew A. Hopcroft,
B. Kim,
Thomas W. Kenny
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.18
Subject(s) - resonator , bifurcation , microelectromechanical systems , oscillation (cell signaling) , bifurcation theory , point (geometry) , control theory (sociology) , physics , self oscillation , computer science , optoelectronics , mathematics , nonlinear system , geometry , artificial intelligence , control (management) , quantum mechanics , biology , genetics