Open AccessVACUUM ENCAPSULATED RESONATORS FOR HUMIDITY MEASUREMENT
Author(s) -
R.G. Hennessy,
Max M. Shulaker,
Renata Melamud,
N. Klejwa,
Saurabh A. Chandorkar,
B.S. Kim,
J. Provine,
Tom Kenny,
Roger T. Howe
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.132
Subject(s) - resonator , tuning fork , humidity , relative humidity , materials science , optoelectronics , silicon , vibration , acoustics , physics , meteorology
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