Open AccessVACUUM ENCAPSULATED RESONATORS FOR HUMIDITY MEASUREMENT
Author(s) -
R.G. Hennessy,
Max M. Shulaker,
R. Melamud,
N. Klejwa,
Saurabh A. Chandorkar,
B.S. Kim,
J. Provine,
Tom Kenny,
R.T. Howe
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.132
Subject(s) - humidity , resonator , materials science , optoelectronics , acoustics , environmental science , physics , meteorology