Open AccessQUALITY FACTOR SENSITIVITY TO CRYSTALLOGRAPHIC AXIS MISALIGNMENT IN SILICON MICROMECHANICAL RESONATORS
Author(s) -
Ashwin K. Samarao,
Farrokh Ayazi
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.130
Subject(s) - resonator , silicon , materials science , offset (computer science) , q factor , fabrication , sensitivity (control systems) , transduction (biophysics) , quality (philosophy) , optoelectronics , optics , physics , electronic engineering , chemistry , engineering , computer science , quantum mechanics , medicine , biochemistry , alternative medicine , pathology , programming language
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