Open AccessQUALITY FACTOR SENSITIVITY TO CRYSTALLOGRAPHIC AXIS MISALIGNMENT IN SILICON MICROMECHANICAL RESONATORS
Author(s) -
Ashwin K. Samarao,
Farrokh Ayazi
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.130
Subject(s) - resonator , silicon , materials science , sensitivity (control systems) , quality (philosophy) , q factor , optoelectronics , optics , crystallography , physics , electronic engineering , engineering , chemistry , quantum mechanics