Open AccessSINGLE-LAYER ELASTOMERIC OUT-OF-PLANE ACTUATOR WITH ASYMMETRIC SURFACE PROFILE
Author(s) -
T. Maleki,
Girish Chitnis,
A. Panja,
Babak Ziaie
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.111
Subject(s) - actuator , materials science , polydimethylsiloxane , elastomer , displacement (psychology) , layer (electronics) , cantilever , electrode , composite material , voltage , electrical conductor , optoelectronics , electrical engineering , physics , engineering , psychology , quantum mechanics , psychotherapist
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