Open AccessA WIRELESSLY CONTROLLED SHAPE-MEMORY-ALLOY MEMS GRIPPER MICROFABRICATED USING AN ELECTROPLATING-BASED BONDING PROCESS
Author(s) -
Mohamed Sultan Mohamed Ali,
Kenichi Takahata
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.108
Subject(s) - materials science , actuator , microelectromechanical systems , electroplating , grippers , planar , shape memory alloy , optoelectronics , electrical engineering , mechanical engineering , nanotechnology , composite material , computer science , engineering , layer (electronics) , computer graphics (images)
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