Open AccessA WIRELESSLY CONTROLLED SHAPE-MEMORY-ALLOY MEMS GRIPPER MICROFABRICATED USING AN ELECTROPLATING-BASED BONDING PROCESS
Author(s) -
Mohamed Sultan Mohamed Ali,
Kenichi Takahata
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.108
Subject(s) - microelectromechanical systems , electroplating , materials science , shape memory alloy , process (computing) , alloy , mechanical engineering , computer science , embedded system , optoelectronics , engineering , metallurgy , nanotechnology , operating system , layer (electronics)