Open AccessVERTICALLY ALIGNED SILICON NANOWIRE ACTUATORS AND SWITCHES
Author(s) -
Loucas Tsakalakos,
K. Subramanian,
X. Wang,
Marco Aimi,
Chris Keimel,
Joleyn Balch,
Aram Byun,
Jody Fronheiser,
Joseph Iannotti,
Lingpeng Yan,
Thomas P. Feist,
Jeffrey B. Fortin
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.88
Subject(s) - nanowire , microelectromechanical systems , materials science , nanosecond , silicon , optoelectronics , electrode , chemical vapor deposition , silicon nanowires , actuator , scanning electron microscope , nanotechnology , electrical engineering , optics , composite material , chemistry , engineering , laser , physics
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