Open AccessAN IMPLANTABLE CAPACITIVE MICROMACINED ULTRASONIC IMAGER PROBE FOR PHOTOACOUSTIC IMAGING
Author(s) -
Xin Cheng,
J. Chen,
ShuWei Huang,
Russell S. Witte,
Peng Lin
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.81
Subject(s) - capacitive micromachined ultrasonic transducers , ultrasonic sensor , materials science , capacitive sensing , photoacoustic imaging in biomedicine , transducer , microelectromechanical systems , surface micromachining , optoelectronics , photoacoustic effect , silicon , ultrasound , etching (microfabrication) , acoustics , optics , layer (electronics) , electrical engineering , nanotechnology , fabrication , engineering , physics , medicine , alternative medicine , pathology
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