Open AccessDESIGN, MODELING AND FABRICATION OF MEMS-BASED MULTICAPILLARY GAS CHROMATOGRAPHY COLUMNS
Author(s) -
M.A. Zareian-Jahromi,
M. Ashraf-Khorasani,
L.T. Taylor,
Masoud Agah
Publication year - 2008
Publication title -
2008 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.67
Subject(s) - microelectromechanical systems , fabrication , gas chromatography , materials science , chromatography , nanotechnology , chemistry , medicine , alternative medicine , pathology