Open AccessA MEMS PHOSPHONATE SENSOR
Author(s) -
Chelsea N. Monty,
Ik-Hyun Oh,
Mark A. Shan,
Richard I. Masel
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.65
Subject(s) - phosphonate , microelectromechanical systems , membrane , sensitivity (control systems) , channel (broadcasting) , response time , materials science , signal (programming language) , noise (video) , electronic engineering , optoelectronics , analytical chemistry (journal) , computer science , chemistry , chromatography , electrical engineering , engineering , organic chemistry , biochemistry , computer graphics (images) , artificial intelligence , image (mathematics) , programming language
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