Open AccessA MEMS PHOSPHONATE SENSOR
Author(s) -
Chelsea N. Monty,
Ik-Hyun Oh,
Mark A. Shan,
Richard I. Masel
Publication year - 2008
Publication title -
2008 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.65
Subject(s) - phosphonate , microelectromechanical systems , computer science , materials science , nanotechnology , chemistry , organic chemistry