Open AccessPRINTING MEMS: FROM A SINGLE FLEXIBLE POLYMIDE FILM TO THREE-DIMENSIONAL INTEGRATED MICROFLUIDICS
Author(s) -
W. Wang,
Zhen Qiu,
Shan Zhao,
Hailin Cong,
Tingrui Pan,
He Zhu,
Alexander Revzin
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.62
Subject(s) - microfabrication , microfluidics , microelectromechanical systems , materials science , surface micromachining , photolithography , lithography , nanotechnology , soft lithography , fabrication , etching (microfabrication) , cleanroom , microsystem , optoelectronics , layer (electronics) , medicine , alternative medicine , pathology
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