Open AccessPRINTING MEMS: FROM A SINGLE FLEXIBLE POLYMIDE FILM TO THREE-DIMENSIONAL INTEGRATED MICROFLUIDICS
Author(s) -
W. Wang,
Hailin Cong,
Zhen Qiu,
Siwei Zhao,
Hui Zhu,
Alexander Revzin,
Tingrui Pan
Publication year - 2008
Publication title -
2008 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.62
Subject(s) - microfluidics , microelectromechanical systems , polyamide , materials science , computer science , nanotechnology , composite material