Open AccessPHOTOPATTERNABLE CONDUCTIVE PDMS AS A NEW MEMS MATERIAL
Author(s) -
Hailin Cong,
Tingrui Pan
Publication year - 2008
Publication title -
2008 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.60
Subject(s) - materials science , electrical conductor , microelectromechanical systems , nanotechnology , composite material