Open AccessPHOTOPATTERNABLE CONDUCTIVE PDMS AS A NEW MEMS MATERIAL
Author(s) -
Hailin Cong,
Tingrui Pan
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.60
Subject(s) - polydimethylsiloxane , materials science , electrical conductor , photoresist , elastomer , composite material , composite number , conductive polymer , adhesive , conductivity , microelectromechanical systems , epoxy , electrical resistivity and conductivity , polymer , nanotechnology , electrical engineering , chemistry , engineering , layer (electronics)
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