Open AccessOPTIMIZING DIRECT PRINTING OF PZT THIN FILMS
Author(s) -
Stephen Bathurst,
Jooeun Jeon,
H.W. Lee,
S.G. Kim,
Peter Mardilovich
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.59
Subject(s) - materials science , microelectromechanical systems , thin film , fabrication , lead zirconate titanate , spin coating , microfabrication , etching (microfabrication) , deposition (geology) , piezoelectricity , nanotechnology , optoelectronics , composite material , ferroelectricity , medicine , paleontology , alternative medicine , pathology , layer (electronics) , sediment , biology , dielectric
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