Open AccessLOW-TEMPERATURE (<300ºC) LOW-STRESS SILICON CARBIDE SURFACE MICROMACHINING FABRICATION TECHNOLOGY
Author(s) -
Frédéric Nabki,
Tomas A. Dusatko,
Srikar Vengallatore,
M.N. El-Gamal
Publication year - 2008
Publication title -
2008 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.57
Subject(s) - surface micromachining , silicon carbide , fabrication , materials science , bulk micromachining , wide bandgap semiconductor , silicon , stress (linguistics) , carbide , optoelectronics , metallurgy , pathology , medicine , linguistics , philosophy , alternative medicine