Open AccessFABRICATION OF ATOM TRAPPING CHIPS WITH FEEDTHROUGH INTERCONNECTS FOR APPLICATIONS IN ATOM OPTICS
Author(s) -
HoChiao Chuang,
Dana Z. Anderson,
Victor M. Bright
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.56
Subject(s) - materials science , fabrication , silicon nitride , feedthrough , atom optics , microfabrication , atom (system on chip) , trapping , optoelectronics , silicon , microelectronics , torr , optics , physics , medicine , ecology , alternative medicine , pathology , computer science , biology , embedded system , thermodynamics
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom