Open AccessINTEGRATED MEMS SWITCH TECHNOLOGY ON SOI-CMOS
Author(s) -
Júlio Costa,
Tony Ivanov,
Jules L. Hammond,
J. Gering,
E. Glass,
Jason D. Reed,
S. C. Crist,
T. Mercier,
S. Kim,
J. Jorgenson,
P. Gorisse,
David C. Dening,
D. Kerr
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.5
Subject(s) - microelectromechanical systems , silicon on insulator , electronic engineering , cmos , materials science , electrical engineering , integrated circuit , engineering , silicon , optoelectronics
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