Open AccessINTEGRATED MEMS SWITCH TECHNOLOGY ON SOI-CMOS
Author(s) -
J. Costa,
Tony Ivanov,
Jules L. Hammond,
Joe Gering,
E. Glass,
Jason D. Reed,
S. C. Crist,
T. Mercier,
S. Kim,
J. Jorgenson,
P. Gorisse,
D. C. Dening,
D. Kerr
Publication year - 2008
Publication title -
2008 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.5
Subject(s) - silicon on insulator , cmos , microelectromechanical systems , electronic engineering , electrical engineering , computer science , materials science , optoelectronics , engineering , silicon