Open AccessMEASURING CHARGE AND CHARGE DECAY IN FLOATING-ELECTRODE ELECTROSTATIC ACTUATORS
Author(s) -
David Elata,
R. P. Hennessy,
Vitaly Leus,
N. Klejwa,
Ar Hirshberg,
J. Provine,
Roger T. Howe
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.48
Subject(s) - voltage , charge (physics) , actuator , electrode , electrostatics , work (physics) , amplitude , materials science , electric potential , electrostatic induction , electrical engineering , optoelectronics , physics , atomic physics , engineering , optics , quantum mechanics , thermodynamics
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