Open AccessMEASURING CHARGE AND CHARGE DECAY IN FLOATING-ELECTRODE ELECTROSTATIC ACTUATORS
Author(s) -
David Elata,
R. P. Hennessy,
Vitaly Leus,
N. Klejwa,
A. Hirshberg,
J. Provine,
Roger T. Howe
Publication year - 2008
Publication title -
2008 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.48
Subject(s) - charge (physics) , electrode , electrostatics , actuator , materials science , atomic physics , electrostatic discharge , charge control , optoelectronics , voltage , electrical engineering , physics , engineering , quantum mechanics , power (physics) , battery (electricity)