Open AccessCHARACTERIZATION OF MAGNETIC NANOPARTICLE-EMBEDDED SU8 FOR MICROACTUATION
Author(s) -
Kuan Lin Tsai,
Maryam Ziaei-Moayyed,
N. Klejwa,
Rob N. Candler,
Wang Hu,
S.X. Wang,
Roger T. Howe
Publication year - 2008
Publication title -
2008 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.44
Subject(s) - characterization (materials science) , nanoparticle , magnetic nanoparticles , materials science , nanotechnology